83695

The 83695 is a Pressure Sensor calibrated and digitally compensated silicon piezoresistive sensors with SPI interface. In addition to pressure, the sensors provide acceleration, temperature and supply voltage measurements. The sensor has excellent media compatibility due to a patented bulk micro machined triple stack sensor die design, utilizing buried piezoresistive elements and backside media access to pressure diaphragm. With this design the internal connectors and piezoresistive elements of the pressure bridge are isolated from the measurement media. The isolation is of great advantage in terms of sensor stability and reliability over a very long lifetime. The sensor design has been proven in harsh environment applications during a period of more than 10 years.

• Digital interface, SPI
• Absolute pressure sensor
• Calibrated and compensated
• Sensor self diagnosis
• Unique electronic sensor ID
• High reliability and accuracy over lifetime
• High media compatibility
• Wide temperature operating range
• Temperature and supply voltage measurement
• 0.3µA Low standby current
• No external discrete components required
• High static acceleration and shock capability (2000g)