MXD2020EL

The MXD2020EL is a non-temperature compensated high-performance XY Thermal Accelerometer with very low 0g offset drift versus temperature. It is very repeatable and immune from mechanical shocks changing its operating characteristics making it ideal for demanding applications where a user temperature calibration will be applied on a per device basis to achieve the performance needed for the most demanding applications. In addition to the acceleration outputs, the MXD2020EL also provides a very repeatable analogue temperature output which can be used for the over-temperature calibration. Thermal MEMS sensing technology provides unsurpassed vibration immunity with an inherent low-pass frequency response of 17Hz eliminating errors attributable to out-of-band and not-of-interest higher frequency accelerations. It is built monolithically using a standard 0.6um CMOS process.